基于 Smith 变论域模糊自适应 PID 蒸发源温度控制
({{custom_author.role_cn}}), {{javascript:window.custom_author_cn_index++;}}Temperature Control of Evaporation Source Based on Smith Variable Universe Fuzzy Adaptive PID
({{custom_author.role_en}}), {{javascript:window.custom_author_en_index++;}}| {{custom_ref.label}} |
{{custom_citation.content}}
{{custom_citation.annotation}}
|
/
| 〈 |
|
〉 |
