Abstract: The reliability of the collision sensor under acoustic wave excitation is tested and analyzed. The MEMS (Micro Electro Mechanical Systems) structures and their working principles are analyzed and explored. Through the self-built system, the acceleration value measured by the collision sensors is analyzed, and the simultaneous test frequency value is read, then they are combined for data analysis. On this basis, acoustic wave from multi-device, multi-frequency point, multi-direction and different modulation methods are used to evaluate the reliability of the collision sensor, which can avoid the situation that the air bag explode in the error cases.

摘要： 对声波激励下碰撞传感器的可靠性进行测试和分析。对其微机电系统(Micro Electro Mechanical Systems, MEMS)结构进行细致解析，探究其工作原理。通过自搭建系统，一方面解析碰撞传感器测量的加速度值，另一方面将同时刻的测试频率进行读取，进而将两者结合进行数据分析。在此基础上，采用多设备、多频点、多方向及不同调制方式的声波对碰撞传感器的可靠性进行评估，进而有效地避免安全气囊误起爆情况的发生。

关键词: 碰撞传感器, 声波, MEMS, 数据分析, 调制