Monitoring for Batch Process of Hexamethyldisilane and Hexamethyldisilazane

LI Zhi-hao, CHEN Zi-hao, ZHENG Nian-nian, LUAN Xiao-li, LIU Fei

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (12) : 2451-2455.

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (12) : 2451-2455.

Monitoring for Batch Process of Hexamethyldisilane and Hexamethyldisilazane

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 28(12): 2451-2455

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