Adaptive Feedforward Control for Reticle Stage of Lithography

TAN En-min, SHI Ting-ting, ZHANG Zhi-gang, ZHANG Lin

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (6) : 1069-1074.

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (6) : 1069-1074.

Adaptive Feedforward Control for Reticle Stage of Lithography

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 28(6): 1069-1074

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