Research on Optimal Control Strategy of PID Parameters in Atomic Force Microscope

PENG Ji-shen, HAI Dong-qi, HU Shan-hua, HU Peng-ju, KONG Fan-hui

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (6) : 1130-1135.

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (6) : 1130-1135.

Research on Optimal Control Strategy of PID Parameters in Atomic Force Microscope

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 28(6): 1130-1135

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