Temperature Control of Evaporation Source Based on Smith Variable Universe Fuzzy Adaptive PID

HE Zi-ming, NIU Jiang-chuan, Zhang Jing

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (7) : 1308-1314.

Control Engineering of China ›› 2021, Vol. 28 ›› Issue (7) : 1308-1314.

Temperature Control of Evaporation Source Based on Smith Variable Universe Fuzzy Adaptive PID

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 28(7): 1308-1314

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