基于 Smith 变论域模糊自适应 PID 蒸发源温度控制

贺自名, 牛江川, 张静

Temperature Control of Evaporation Source Based on Smith Variable Universe Fuzzy Adaptive PID

HE Zi-ming, NIU Jiang-chuan, Zhang Jing

控制工程 . 2021, (7): 1308 -1314 .